Features

• Use of a large electron beam welder makes chamber for large liquid crystal possible.
• High accuracy and fine finish.
• Chamber production by TIG welding is available.
• Chamber of aluminum welding structure is also available.

Achievements

• More than 300 units of chamber for large liquid crystal panel manufacturing equipment have been installed.

New machining facility
(semi clean room)

Floor area	Approx. 2000m2
Crane Height	Approx. 10m
Cleanliness	Class 100000

Welding quality is improved and it is applicable for fabrication of equipment.
Completed in August 2005

The following equipments are also available.
- Large 5-dimension processing machinery (Width 3.6m)
- Portal crane (Width 5m)

Manufacturing sample for Aluminum alloy chamber

• Vacuum degassing furnace
• Ultrahigh vacuum sputtering equipment, etc

Effective distance between columns		4,100mm
Table size		3,500 x 8,000mm
Largest loading amount		30ton
Shaft moving amount	X	8,250mm
	Y	4,500mm
	Z	600mm
	W	2,350mm

With angular attachment
Machining either before or after welding is available.
Started operation in September 2005

Type	Square type (with work rotating function)
Dimension (mm)	800 x 800H
Capacity	Aluminum alloys A 6061 (Internal EXGBB machining)
Target vacuum degree	10-6 Pa’s

• It can be used for either plasma polymerization or plasma treatment. (Introduction of plasma polymerize raw material is optional)
• High vacuum is available by adoption of turbo element pump.
• Outer electrode method adopted
• Large special antenna adopted to create homogeneous plasma production in wide area
• New vertical rectangular chamber
• Complete automatic control (Automatic / manual mode switching is available)
• Design can be modified depending on usage.

Small production equipment
Type	Vertical cylindrical type
Dimension (mm)	Φ1400 X 440H
Capacity (L)	670
Material	SUS304 (Possible to change to aluminum-made etc.)

Plasma polymerization tester
Type	Vertical cylindrical type
Dimension (mm)	Φ700 X 600H
Capacity (L)	300
Material	SUS304 (Possible to change to aluminum-made etc.)

Can monitor at real time or 8 points at the same time

Basic spec

Output signal	1-5V
Fiber length	3m (8 pieces)
Power voltage	AC100V
Outer dimension	Width 480 x Depth 201 x Height 249

Features

• Can monitor 2 wavelengths x 8ch at the same time
• Can change light receipt range in two levels
• Superior in heat and noise resistance by adoption of optical fiber method
• Taking data into PC is available as an option.

*Changes to 1 wavelength and in the number of channels are possible.

Usage

Supervision of plasma condition of CVD, sputter, etching, etc.

1. Process pass or fail
2. Optimization of process condition
3. Plasma abnormality detection