Business & Technology

Vacuum Technology

Our activity

Vacuum Coating systems

- Vapor Deposition systems

Plasma-assisted vapor deposition system

- Sputtering systems

Multi source sputtering system

Sputtering system in Ultra-high vacuum

- PECVD systems

RF PECVD system

Plasma polymerization

Production & Manufacturing

Vacuum coating equipments

Vacuum chamber

Application

Information & Communication

Optics

Energy

Food & Beverages

TSK's Key Technologies

Metal Oxide layer (SiO2, TiO2, ZrO,etc.)

Metal Nitride layer (SiN, TiN, etc.)

Transparent Conductive layer (ITO, ZnO)

Barrier Coatings

Large size Vacuum chamber (Electron Beam Welding)

TSK supplies the production equipment required including technologies appropriate for vacuum coatings.


Plasma-assisted vapor deposition system


Multi-Sputtering equipment in ultra-high vacuum for Tohoku Univ.