Vacuum Technology

- Tsukishima Kikai exclusively supplies large-sized vacuum chambers for LCD (Liquid Crystal Display)panel manufacturing facilities, with the aim of supporting the production of LCD panels which increase in size with each generation (10th generation).

Major Products and Technologies

Electron Beam Welders
(Large-sized vacuum chamber manufacturing equipment)

Electron beam welding is a technique that takes advantage of phenomenon which the moving energy of electrons can be converted into thermal energy when a thinly squeezed electron beam is irradiated onto a substance at high speed. This welding method has effective and advantageous features that don’t need welding materials, offers high reliability and very low heating effect. Tsukishima Kikai owns two electron beam welders that boast of the largest scale in Japan.

For detailed product information, please see “Business & Technology.”
Other Vacuum Products

Terminology

Vacuum chamber

A vessel designed to create a below the atmospheric pressure environment (vacuum environment), and is applied in forming thin films, conducting microfabrication, etc. Tsukishima Kikai's strong point is its ability to make large vacuum chambers (one side measuring nearly 2 meters) with joined aluminum by electron beam welding. This type of vacuum chamber is primarily used in the microfabrication of LCD panel manufacturing equipment.